Structure Design and Analysis of Turbomolecular Pump Blade

Turbomolecular pump is a precision high-speed rotating machinery, the design process of the spindle, rotor and other key pieces of the design for scientific and accurate calculations, the verification is particularly important. This paper describes the structural design, finite element analysis (stress analysis and displacement analysis) of turbine blades of turbo molecular pump with PRO / E, PRO / MECHANICA software (trial version), which greatly improves the accuracy of design and enhances the design of Reliability and shorten the product development cycle. The CAD, CAE effectively applied to the actual product structure design, product development will play a significant role. Turbo molecular pump is a precision high-speed rotating mechanical system, mainly used to obtain high vacuum and ultra-high vacuum. At present, the rapid development of molecular electronics industry, semiconductor lighting industry, flat panel display industry, solar cell industry, optical components industry and thin film industry at home and abroad has promoted the rapid development of molecular pumps. At the same time, due to the urgent requirements of times and industries, In the design process of molecular pump, a "short cycle, high reliability" design concepts came into being, however, the design of molecular pump itself is a relatively complex process, to achieve "short cycle, high reliability "The design concept, far from traditional design methods, must rely on today's mainstream CAD, CAE software collaboration can be achieved. PRO / MECHANICA is a Finite Element Analysis software developed by PTC that integrates seamlessly with the company's PRO / E, a 3D geometric model built with PRO / E that can be directly imported into PRO / MECHANICA for structural or thermodynamic analysis , And when the 3D geometry changes, the PRO / MECHANICA established in the structure or thermodynamic analysis through a simple "analysis and update" can be easily updated with the analysis results, completely without data loss, so PRO / MECHANICA Will enable architects to focus on the design work early in the design because of the combination of analysis, real-time optimization of the structure, and shorten the entire design cycle, thereby reducing design costs, which is the mainstream of other mainstream CAE software advantages . The article describes the design of turbo-molecular pump (taking FF250-250 / 1600 composite pump researched and developed by our company as an example), taking one of the important parts (turbo rotor) as an example, using the PRO / E, PRO / MECHANICA software 3D structure design and analysis of its greatly shorten the R & D cycle and improve the reliability of product structure design and truly achieve the "short cycle, high reliability," the design concept. 1. Design and structural analysis of the blade 3D design of the blade 3D model of the blade is established under PRO / E environment. The parameters of the blade are as follows: the blade thickness is 7 mm, the blade aperture is 74 mm, the tip diameter is 257 mm, Diameter 134 mm, pitch angle 40 °, tooth thickness 2.5 mm, number of teeth 38 teeth, flange thickness 12 mm, flange outer diameter 109 mm, connecting holes 6-Φ8.4 uniform. 2, the application of seamless integration software PRO / E and PRO / MECHANICA mechanical product structure optimization design and finite element analysis, will greatly shorten the product development cycle, at the same time, structural analysis data for the design of the product provides a powerful technology Support, product design more reliable, more accurate. In general, the theoretical analysis of data (such as stress, displacement data) by a safety factor S (experience value) can be used as the actual product data, S take 1.1 ~ 1.2. The structural design and analysis of the turbo molecular pump blades provided in this paper is a successful case of the application of PRO / E and PRO / MECHANICA.

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